New PDF release: A Practical Guide to Optical Metrology for Thin Films

By Michael Quinten

A one-stop, concise consultant on deciding upon and measuring skinny movie thickness via optical methods.

This functional publication covers the legislation of electromagnetic radiation and interplay of sunshine with topic, in addition to the idea and perform of thickness dimension, and glossy functions. In so doing, it indicates the services and possibilities of optical thickness choice and discusses the strengths and weaknesses of size units in addition to their review methods.

Following an creation to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in area and subject. the most subject of this publication, the choice of the thickness of a layer in a layer stack by means of measuring the spectral reflectance or transmittance, is taken care of within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. eventually, in bankruptcy 7, the writer discusses a number of commercial functions of the layer thickness size, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive movies, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at business and educational researchers, engineers, builders and brands considering all components of optical layer and skinny optical movie size and metrology, approach regulate, real-time tracking, and applications.

Content:
Chapter 1 creation (pages 1–5):
Chapter 2 Propagation of sunshine and different Electromagnetic Waves (pages 7–57):
Chapter three Spectral Reflectance and Transmittance of a Layer Stack (pages 59–80):
Chapter four The Optical dimension (pages 81–119):
Chapter five Thin?Film Thickness decision (pages 121–140):
Chapter 6 the colour of skinny movies (pages 141–147):
Chapter 7 purposes (pages 149–185):

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A one-stop, concise consultant on choosing and measuring skinny movie thickness via optical equipment. This useful ebook covers the legislation of electromagnetic radiation and interplay of sunshine with subject, in addition to the idea and perform of thickness size, and smooth functions. In so doing, it exhibits the services and possibilities of optical thickness decision and discusses the strengths and weaknesses of size units in addition to their assessment equipment.

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Extra resources for A Practical Guide to Optical Metrology for Thin Films

Example text

Experimental values of e1(v) and e2(v) are, however, available only for restricted regions. Therefore, the above integrals must be divided into parts, for example, the real part 2 e1 ðvÞ ¼ 1 þ p V ð1 0 Ve2 ðVÞ 2 dV þ ˆ 2 2 p V Àv V ð2 V1 Ve2 ðVÞ 2 dV þ 2 2 p V Àv 1 ð V2 Ve2 ðVÞ dV: V2 Àv2 ð2:118Þ While the mid integral can be calculated exactly, the two other integrals must be estimated using reasonable assumptions. 1. Beyond that several empiric formulas for the refractive index n(l) have been developed.

For example, for g ¼ 500 nm (groove density L ¼ 1/ g ¼ 2000 grooves/mm), e ¼ 0 , and l ¼ 500 nm, one obtains sin(b) ¼ 1 for the first order m ¼ Æ1. Then, all wavelengths l > 500 nm cannot be diffracted. 13 Free spectral ranges of the orders m ¼ Æ1, Æ2, and Æ3 for a grating with g ¼ 2500 nm. 5 Diffraction One of the most important properties of a grating is the grating efficiency. The absolute efficiency of a grating is the percentage of incident monochromatic radiation on a grating that is diffracted into a desired order.

Introducing breadths cC and cV (both energies) for the conduction and valence band tails, O’ Leary, Johnson, and Lim modeled the density of states for the conduction and valence band of an amorphous semiconductor. 22 shows the density of states N(E) in this model. O’ Leary, Johnson, and Lim derived the optical absorption coefficient aOJL(E) with E ¼ hv as pffiffiffi pffiffiffi 2 3=2 2 3=2 2 aOJL ðEÞ ¼ D ðEÞ 2 3 mC 2 3 mV JðEÞ: ð2:107Þ p h p h Here, mC and mV are the effective mass of electrons in the conduction and valence band.

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